AURION Anlagentechnik GmbH – plasma technology = plasma systems + high frequency components. AURION Anlagentechnik GmbH was founded by three entrepreneurs towards the end of 1996. The idea which led to this was to produce efficient, low-cost and environmentally friendly components and complete systems for surface treatment. AURION develops and constructs components which supply power to plasma systems. This includes impedance adaptation networks with automatic tuning as well as filters, switches, phase shifters, power splitters, lines and connectors. The main focus is in the field of high-frequency plasma processes at 13.56–27.12 MHz. Building on our expertise in component manufacturing, AURION also offers complete systems for plasma-enhanced surface treatment. This includes surface cleaning and modification as well as coating and etching processes (PVD, PECVD, RIE, microwave).